$CM_FORMAT JEOL/EO $CM_VERSION 1.0 $CM_COMMENT Plymouth EMC $CM_DATE 2016-10-24 $CM_TIME 15:58:36 $CM_OPERATOR General Use $CM_INSTRUMENT JSM-6610 $CM_ACCEL_VOLT 15 $CM_MAG 70 $CM_SIGNAL BES $CM_STAGE_POS -5.371 2.461 22.999 0.000 0.000 $CM_STAGE_X -5.371 $CM_STAGE_Y 2.461 $CM_STAGE_T 0.000 $CM_STAGE_Z 22.999 $CM_STAGE_R 0.000 $$SM_MICRON_MARKER 200ƒÊm $$SM_FILM_NUMBER 0000 $$SM_TITLE PC-SEM M600 $$SM_WD 11 $$SM_SPOT_SIZE 50 $$SM_VACUUM 65 $$SM_PHOTO ON $$SM_MERGE ON $$SM_SIGNAL1 $$SM_SIGNAL2 $$SM_MULTI $$SM_VAC_MODE LV