$CM_FORMAT JEOL/EO $CM_VERSION 1.0 $CM_COMMENT Plymouth EMC $CM_DATE 2016-10-24 $CM_TIME 17:11:52 $CM_OPERATOR General Use $CM_INSTRUMENT JSM-6610 $CM_ACCEL_VOLT 15 $CM_MAG 500 $CM_SIGNAL SEI $CM_STAGE_POS -5.871 9.494 19.999 0.000 0.000 $CM_STAGE_X -5.871 $CM_STAGE_Y 9.494 $CM_STAGE_T 0.000 $CM_STAGE_Z 19.999 $CM_STAGE_R 0.000 $$SM_MICRON_MARKER 50ƒÊm $$SM_FILM_NUMBER 0000 $$SM_TITLE PC-SEM M600 $$SM_WD 13 $$SM_SPOT_SIZE 33 $$SM_VACUUM $$SM_PHOTO ON $$SM_MERGE ON $$SM_SIGNAL1 $$SM_SIGNAL2 $$SM_MULTI $$SM_VAC_MODE HV