$CM_FORMAT JEOL/EO $CM_VERSION 1.0 $CM_COMMENT Plymouth EMC $CM_DATE 2016-10-31 $CM_TIME 16:00:13 $CM_OPERATOR General Use $CM_INSTRUMENT JSM-6610 $CM_ACCEL_VOLT 15 $CM_MAG 650 $CM_SIGNAL SEI $CM_STAGE_POS -11.582 -7.352 29.999 0.003 -0.003 $CM_STAGE_X -11.582 $CM_STAGE_Y -7.352 $CM_STAGE_T -0.003 $CM_STAGE_Z 29.999 $CM_STAGE_R 0.003 $$SM_MICRON_MARKER 20ƒÊm $$SM_FILM_NUMBER 0000 $$SM_TITLE PC-SEM M600 $$SM_WD 13 $$SM_SPOT_SIZE 37 $$SM_VACUUM $$SM_PHOTO ON $$SM_MERGE ON $$SM_SIGNAL1 $$SM_SIGNAL2 $$SM_MULTI $$SM_VAC_MODE HV