$CM_FORMAT JEOL/EO
$CM_VERSION 1.0
$CM_COMMENT Plymouth EMC
$CM_DATE 2017-10-31
$CM_TIME 13:51:52
$CM_OPERATOR General Use
$CM_INSTRUMENT JSM-6610
$CM_ACCEL_VOLT 15
$CM_MAG 130
$CM_SIGNAL SEI
$CM_STAGE_POS 2.177 -2.314 20.000 0.000 0.003
$CM_STAGE_X 2.177
$CM_STAGE_Y -2.314
$CM_STAGE_T 0.003
$CM_STAGE_Z 20.000
$CM_STAGE_R 0.000
$$SM_MICRON_MARKER 100ƒÊm
$$SM_FILM_NUMBER 0000
$$SM_TITLE PC-SEM M600
$$SM_WD 10
$$SM_SPOT_SIZE 43
$$SM_VACUUM 
$$SM_PHOTO ON
$$SM_MERGE ON
$$SM_SIGNAL1 
$$SM_SIGNAL2 
$$SM_MULTI 
$$SM_VAC_MODE HV