$CM_FORMAT JEOL/EO $CM_VERSION 1.0 $CM_COMMENT Plymouth EMC $CM_DATE 2017-10-31 $CM_TIME 16:11:04 $CM_OPERATOR General Use $CM_INSTRUMENT JSM-6610 $CM_ACCEL_VOLT 15 $CM_MAG 1500 $CM_SIGNAL SEI $CM_STAGE_POS 13.014 3.480 12.001 0.000 0.003 $CM_STAGE_X 13.014 $CM_STAGE_Y 3.480 $CM_STAGE_T 0.003 $CM_STAGE_Z 12.001 $CM_STAGE_R 0.000 $$SM_MICRON_MARKER 10ƒÊm $$SM_FILM_NUMBER 0000 $$SM_TITLE PC-SEM M600 $$SM_WD 11 $$SM_SPOT_SIZE 40 $$SM_VACUUM $$SM_PHOTO ON $$SM_MERGE ON $$SM_SIGNAL1 $$SM_SIGNAL2 $$SM_MULTI $$SM_VAC_MODE HV