$CM_FORMAT JEOL/EO $CM_VERSION 1.0 $CM_COMMENT Plymouth EMC $CM_DATE 2017-11-03 $CM_TIME 14:18:23 $CM_OPERATOR General Use $CM_INSTRUMENT JSM-6610 $CM_ACCEL_VOLT 15 $CM_MAG 550 $CM_SIGNAL SEI $CM_STAGE_POS 3.376 5.676 29.496 359.997 1.187 $CM_STAGE_X 3.376 $CM_STAGE_Y 5.676 $CM_STAGE_T 1.187 $CM_STAGE_Z 29.496 $CM_STAGE_R 359.997 $$SM_MICRON_MARKER 20ƒÊm $$SM_FILM_NUMBER 0000 $$SM_TITLE PC-SEM M600 $$SM_WD 15 $$SM_SPOT_SIZE 30 $$SM_VACUUM $$SM_PHOTO ON $$SM_MERGE ON $$SM_SIGNAL1 $$SM_SIGNAL2 $$SM_MULTI $$SM_VAC_MODE HV