$CM_FORMAT JEOL/EO $CM_VERSION 1.0 $CM_COMMENT Plymouth EMC $CM_DATE 2018-10-23 $CM_TIME 11:53:55 $CM_OPERATOR General Use $CM_INSTRUMENT JSM-6610 $CM_ACCEL_VOLT 15 $CM_MAG 43 $CM_SIGNAL BEC $CM_STAGE_POS 0.871 1.639 37.993 0.000 0.003 $CM_STAGE_X 0.871 $CM_STAGE_Y 1.639 $CM_STAGE_T 0.003 $CM_STAGE_Z 37.993 $CM_STAGE_R 0.000 $$SM_MICRON_MARKER 500ƒÊm $$SM_FILM_NUMBER 0000 $$SM_TITLE PC-SEM M600 $$SM_WD 13 $$SM_SPOT_SIZE 52 $$SM_VACUUM 60 $$SM_PHOTO ON $$SM_MERGE ON $$SM_SIGNAL1 $$SM_SIGNAL2 $$SM_MULTI $$SM_VAC_MODE LV