$CM_FORMAT JEOL/EO $CM_VERSION 1.0 $CM_COMMENT Plymouth EMC $CM_DATE 2018-10-30 $CM_TIME 09:51:40 $CM_OPERATOR General Use $CM_INSTRUMENT JSM-6610 $CM_ACCEL_VOLT 15 $CM_MAG 230 $CM_SIGNAL BEC $CM_STAGE_POS 5.478 -4.849 12.000 359.990 0.003 $CM_STAGE_X 5.478 $CM_STAGE_Y -4.849 $CM_STAGE_T 0.003 $CM_STAGE_Z 12.000 $CM_STAGE_R 359.990 $$SM_MICRON_MARKER 100ƒÊm $$SM_FILM_NUMBER 0000 $$SM_TITLE PC-SEM M600 $$SM_WD 11 $$SM_SPOT_SIZE 55 $$SM_VACUUM 60 $$SM_PHOTO ON $$SM_MERGE ON $$SM_SIGNAL1 $$SM_SIGNAL2 $$SM_MULTI $$SM_VAC_MODE LV