$CM_FORMAT JEOL/EO $CM_VERSION 1.0 $CM_COMMENT Plymouth EMC $CM_DATE 2018-10-30 $CM_TIME 10:40:30 $CM_OPERATOR General Use $CM_INSTRUMENT JSM-6610 $CM_ACCEL_VOLT 15 $CM_MAG 330 $CM_SIGNAL BEC $CM_STAGE_POS 3.511 -1.031 34.000 0.003 -0.003 $CM_STAGE_X 3.511 $CM_STAGE_Y -1.031 $CM_STAGE_T -0.003 $CM_STAGE_Z 34.000 $CM_STAGE_R 0.003 $$SM_MICRON_MARKER 50ƒÊm $$SM_FILM_NUMBER 0000 $$SM_TITLE PC-SEM M600 $$SM_WD 11 $$SM_SPOT_SIZE 49 $$SM_VACUUM 77 $$SM_PHOTO ON $$SM_MERGE ON $$SM_SIGNAL1 $$SM_SIGNAL2 $$SM_MULTI $$SM_VAC_MODE LV