$CM_FORMAT JEOL/EO $CM_VERSION 1.0 $CM_COMMENT Plymouth EMC $CM_DATE 2019-10-29 $CM_TIME 14:31:03 $CM_OPERATOR General Use $CM_INSTRUMENT JSM-6610 $CM_ACCEL_VOLT 15 $CM_MAG 95 $CM_SIGNAL BEC $CM_STAGE_POS 0.645 0.163 36.982 0.003 0.003 $CM_STAGE_X 0.645 $CM_STAGE_Y 0.163 $CM_STAGE_T 0.003 $CM_STAGE_Z 36.982 $CM_STAGE_R 0.003 $$SM_MICRON_MARKER 200ƒÊm $$SM_FILM_NUMBER 0000 $$SM_TITLE PC-SEM M600 $$SM_WD 11 $$SM_SPOT_SIZE 55 $$SM_VACUUM 65 $$SM_PHOTO ON $$SM_MERGE ON $$SM_SIGNAL1 $$SM_SIGNAL2 $$SM_MULTI $$SM_VAC_MODE LV