$CM_FORMAT JEOL/EO $CM_VERSION 1.0 $CM_COMMENT Plymouth EMC $CM_DATE 2022-10-25 $CM_TIME 11:17:44 $CM_OPERATOR General Use $CM_INSTRUMENT JSM-6610 $CM_ACCEL_VOLT 10 $CM_MAG 2300 $CM_SIGNAL SEI $CM_STAGE_POS 0.382 1.436 41.742 0.000 0.000 $CM_STAGE_X 0.382 $CM_STAGE_Y 1.436 $CM_STAGE_T 0.000 $CM_STAGE_Z 41.742 $CM_STAGE_R 0.000 $$SM_MICRON_MARKER 10ƒÊm $$SM_FILM_NUMBER 0000 $$SM_TITLE PC-SEM M600 $$SM_WD 15 $$SM_SPOT_SIZE 40 $$SM_VACUUM $$SM_PHOTO ON $$SM_MERGE ON $$SM_SIGNAL1 $$SM_SIGNAL2 $$SM_MULTI $$SM_VAC_MODE HV