$CM_FORMAT JEOL/EO
$CM_VERSION 1.0
$CM_COMMENT Plymouth EMC
$CM_DATE 2022-11-01
$CM_TIME 11:13:00
$CM_OPERATOR General Use
$CM_INSTRUMENT JSM-6610
$CM_ACCEL_VOLT 15
$CM_MAG 1400
$CM_SIGNAL SEI
$CM_STAGE_POS 1.471 -5.122 28.000 0.000 -0.003
$CM_STAGE_X 1.471
$CM_STAGE_Y -5.122
$CM_STAGE_T -0.003
$CM_STAGE_Z 28.000
$CM_STAGE_R 0.000
$$SM_MICRON_MARKER 10ƒÊm
$$SM_FILM_NUMBER 0000
$$SM_TITLE PC-SEM M600
$$SM_WD 15
$$SM_SPOT_SIZE 44
$$SM_VACUUM 
$$SM_PHOTO ON
$$SM_MERGE ON
$$SM_SIGNAL1 
$$SM_SIGNAL2 
$$SM_MULTI 
$$SM_VAC_MODE HV