$CM_FORMAT JEOL/EO
$CM_VERSION 1.0
$CM_COMMENT Plymouth EMC
$CM_DATE 2022-11-01
$CM_TIME 11:37:10
$CM_OPERATOR General Use
$CM_INSTRUMENT JSM-6610
$CM_ACCEL_VOLT 15
$CM_MAG 25000
$CM_SIGNAL SEI
$CM_STAGE_POS 3.080 -5.159 25.991 0.000 -0.003
$CM_STAGE_X 3.080
$CM_STAGE_Y -5.159
$CM_STAGE_T -0.003
$CM_STAGE_Z 25.991
$CM_STAGE_R 0.000
$$SM_MICRON_MARKER 1ƒÊm
$$SM_FILM_NUMBER 0000
$$SM_TITLE PC-SEM M600
$$SM_WD 13
$$SM_SPOT_SIZE 35
$$SM_VACUUM 
$$SM_PHOTO ON
$$SM_MERGE ON
$$SM_SIGNAL1 
$$SM_SIGNAL2 
$$SM_MULTI 
$$SM_VAC_MODE HV