$CM_FORMAT JEOL/EO $CM_VERSION 1.0 $CM_COMMENT Plymouth EMC $CM_DATE 2022-11-01 $CM_TIME 12:41:27 $CM_OPERATOR General Use $CM_INSTRUMENT JSM-6610 $CM_ACCEL_VOLT 15 $CM_MAG 85 $CM_SIGNAL SEI $CM_STAGE_POS -1.678 -0.186 37.986 0.000 0.019 $CM_STAGE_X -1.678 $CM_STAGE_Y -0.186 $CM_STAGE_T 0.019 $CM_STAGE_Z 37.986 $CM_STAGE_R 0.000 $$SM_MICRON_MARKER 200ƒÊm $$SM_FILM_NUMBER 0000 $$SM_TITLE PC-SEM M600 $$SM_WD 16 $$SM_SPOT_SIZE 35 $$SM_VACUUM $$SM_PHOTO ON $$SM_MERGE ON $$SM_SIGNAL1 $$SM_SIGNAL2 $$SM_MULTI $$SM_VAC_MODE HV